國立清華大學「微感測器與致動器產學聯盟」活動公告

• 時間：08/14/2015 (星期五) 下午 14:00-15:30
• 地點：國立清華大學動力機械工程學系 工程一館 108 室

• 宗旨

2013 年多位在微感測器與致動器領域有豐富經驗的清大教授在國科會的支持下推動「微感測器與致動器產學聯盟」(Micro Sensors and Actuators Technology Consortium, mSAT)，希望透過整合學界與國家實驗室的資源和經驗，協助業界解決相關技術問題、提供設備的支援、技術的轉移及人才的培育。

• 演講內容 (Abstract)

The fabrication of micro electro mechanical systems (MEMS) is based on semiconductor process technology, but also needs MEMS-specific process technologies such as deep etching, conformal deposition on 3D microstructures and hermetic wafer bonding. For new types of MEMS, new process tools are often required, and also new process tools open new device technology. Our laboratory is equipped with many lab-made process tools, which have been developed over 40 years. This presentation presents our recently-developed process tools including atomic layer deposition (ALD) systems with multiple sublimate sources, a through-vacuum wafer bonder, a remote-type hot wire reactor for metal reduction and polymer etching, and a vacuum flip chip bonder for hermetic chip-scale packaging (Fig. 1). In addition, examples of MEMS which have been created using the above tools are briefly introduced. The process tools are commercially available with customization, if necessary, via our partner company.

• 講員簡介 (Speaker Bio)

Shuji Tanaka received B.E., M.E. and Dr.E. degrees in mechanical engineering from The University of Tokyo in 1994, 1996 and 1999, respectively. He was Research Associate at Department of Mechatronics and Precision Engineering, Tohoku University from 1999 to 2001, Assistant Professor from 2001 to 2003, and Associate Professor at Department of Nanomechanics from 2003 to 2013. He is currently Professor at Department of Bioengineering and Robotics, and Director of Micro/Nano-Machining Research & Education Center. He was also Fellow of Center for Research and Development Strategy, Japan Science and Technology Agency from 2004 to 2006, and is currently Selected Fellow. He authored more than 350 journal and international conference papers and delivered 100 invited talks. He was honored with The Young Scientists’ Prize, The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology (2009), German Innovation Award, Gottfried Wagener Prize (2012) and other 8 prizes. His research interests include heterogeneous integration, MEMS packaging, acoustic wave devices and piezoelectric devices and materials.

• 參加對象：對微系統領域有興趣之業界及學研界人士
• 名    額：由於座位有限，名額僅 100 人，請於2015/8/12前上網報名http://goo.gl/forms/yfaIfF44UY

• 費    用：一律免費
• 聯絡方式：林金慧 小姐  國立清華大學動機系 
               Email: ch.lin@mx.nthu.edu.tw  電話: (03) 574-2494

             方維倫 特聘教授  國立清華大學動機系

             Email: fang@pme.nthu.edu.tw  電話: (03) 574-2923

主辦單位：國立清華大學「微感測器與致動器產學聯盟」 (網址： http://www.usat.org.tw/)

 SEMI Taiwan (網址：http://www.semi.org/ch/)

科技部

協辦單位：國立清華大學動力機械系、國立清華大學奈微所、國立清華大學工學院產學研合作聯盟