國立清華大學「微感測器與致動器產學聯盟」活動公告（9/10）
國立清華大學「微感測器與致動器產學聯盟」活動公告
時間：09/10/2015 (星期四) 下午 15:00-17:00
地點：國立清華大學動力機械工程學系 工程一館 108 室
地點：國立清華大學動力機械工程學系 工程一館 108 室
宗旨
2013 年多位在微感測器與致動器領域有豐富經驗的清大教授，在國科會的支持下推動「微感測器與致動器產學聯盟」(Micro Sensors and Actuators Technology Consortium, SAT)，希望透過整合學界與國家實驗室的資源和經驗，協助業界解決相關技術問題、提供設備的支援、技術的轉移、及人才的培育。
2013 年多位在微感測器與致動器領域有豐富經驗的清大教授，在國科會的支持下推動「微感測器與致動器產學聯盟」(Micro Sensors and Actuators Technology Consortium, SAT)，希望透過整合學界與國家實驗室的資源和經驗，協助業界解決相關技術問題、提供設備的支援、技術的轉移、及人才的培育。
演講內容 (Abstract)
We have made MEMS cantilever sensors with high sensitivity for micro-force/pressure/acoustics /vibration measurement. The piezo-resistors were formed at the foot of the cantilevers for detecting small strain caused by the force acting on the cantilevers. The micro-force sensor with 100m on a side and 0.3m in thickness can detect differential pressure less than 0.1Pa, or force of 10pN. Since the material of the cantilever is single crystal silicon, the sensor has good properties, such as good linearity.
In addition, I will also talk about my fabless MEMS startup (Touchence Inc., http://www.touchence.jp/en/) which was set up to supply tactile sensors based on piezo-resistive cantilever three years ago. The application of the tactile sensors may range from robots to smartphones which need force sense.
We have made MEMS cantilever sensors with high sensitivity for micro-force/pressure/acoustics /vibration measurement. The piezo-resistors were formed at the foot of the cantilevers for detecting small strain caused by the force acting on the cantilevers. The micro-force sensor with 100m on a side and 0.3m in thickness can detect differential pressure less than 0.1Pa, or force of 10pN. Since the material of the cantilever is single crystal silicon, the sensor has good properties, such as good linearity.
In addition, I will also talk about my fabless MEMS startup (Touchence Inc., http://www.touchence.jp/en/) which was set up to supply tactile sensors based on piezo-resistive cantilever three years ago. The application of the tactile sensors may range from robots to smartphones which need force sense.
講員簡介 (Speaker Bio)
Isao Shimoyama was born in Japan in 1955. He received the B.E., M.E, and Dr. of Engineering degrees in mechanical engineering from The University of Tokyo in 1977, 1979, and 1982, respectively. He joined The University of Tokyo in 1982 and is presently Professor, Director of Information and Robot Technology Research Initiative. His current Research interest is in Robotics, MEMS and nano-on-microsystems.
Isao Shimoyama was born in Japan in 1955. He received the B.E., M.E, and Dr. of Engineering degrees in mechanical engineering from The University of Tokyo in 1977, 1979, and 1982, respectively. He joined The University of Tokyo in 1982 and is presently Professor, Director of Information and Robot Technology Research Initiative. His current Research interest is in Robotics, MEMS and nano-on-microsystems.
|
時間 (Time) |
題目 (Title) |
講員 (Speaker) |
|
15:00-16:00 |
Piezo-resistive MEMS Force Sensors |
Prof. Isao Shimoyama The University of Tokyo |
|
16:00-17:00 |
Coffee time and networking |
|
參加對象：對微系統領域有興趣之業界及學研界人士
名 額：由於座位有限，名額僅 100 人
請於 2015/9/8 前上網報名 http://goo.gl/forms/yfaIfF44UY
費 用：一律免費
聯絡方式：林金慧 小姐 國立清華大學動機系
Email: ch.lin@mx.nthu.edu.tw 電話: (03) 574-2494
方維倫 特聘教授 國立清華大學動機系
Email: fang@pme.nthu.edu.tw 電話: (03) 574-2923
主辦單位：國立清華大學「微感測器與致動器產學聯盟」 (網址： http://www.usat.org.tw/)
SEMI Taiwan (網址：http://www.semi.org/ch/)
科技部
協辦單位：國立清華大學動力機械系、國立清華大學奈微所、國研院國家奈米元件實驗室、
國立清華大學工學院產學研合作聯盟
名 額：由於座位有限，名額僅 100 人
請於 2015/9/8 前上網報名 http://goo.gl/forms/yfaIfF44UY
費 用：一律免費
聯絡方式：林金慧 小姐 國立清華大學動機系
Email: ch.lin@mx.nthu.edu.tw 電話: (03) 574-2494
方維倫 特聘教授 國立清華大學動機系
Email: fang@pme.nthu.edu.tw 電話: (03) 574-2923
主辦單位：國立清華大學「微感測器與致動器產學聯盟」 (網址： http://www.usat.org.tw/)
SEMI Taiwan (網址：http://www.semi.org/ch/)
科技部
協辦單位：國立清華大學動力機械系、國立清華大學奈微所、國研院國家奈米元件實驗室、
國立清華大學工學院產學研合作聯盟
20150910_微感測器與致動器產學聯盟活動.doc