11310E500100 College of Engineering Seminar
工學院英文書報討論

主題 TOPIC
▸　Nanoscale 3D Printing of Silica Glass for the Fabrication of Versatile and Durable Microsystems

摘要 Abstract
❝　Microsystems, which use micro and nanoscale structures to achieve functionalities required for integrated systems in electronics, mechanics, optics, and fluidics, have enabled advancements in everything from smartphones and medical devices to automotive safety systems. Structure and material are two core factors that define the performance of microsystems. Nanoscale 3D printing using femtosecond lasers is an emerging technology for fabricating microsystems with freeform structures that provide various functionalities but are extremely difficult to realize otherwise. However, the available materials for this technology have long been limited to organic polymeric materials, which lack the desired stability and durability for many applications. In contrast, silica glass is a remarkable material used in our daily lives known for its stability, durability, optical transparency, and biocompatibility. In recent years, significant breakthroughs in the resolution for 3D glass printing methods down to tens of nanometers have been demonstrated using femtosecond laser direct writing of silica-nanoparticle-loaded organic composites. These methods, however, require high-temperature treatments exceeding 650 °C to remove organic content and obtain solid silica glass. These elevated temperatures surpass the thermal limits of most materials used in relevant applications. Moreover, the substantial shrinkage and deformation of the printed structures caused by the thermal treatments severely restrict design flexibility. Consequently, fabricating integrated 3D microdevices in glass remains challenging in most application scenarios. To address this, our group has developed an approach that enables 3D printing of solid silica glass with nanoscale resolution without the need for thermal treatments. Furthermore, recently, we have successfully demonstrated 3D printing of glass micro-optics on the tips of optical fibers using this approach. In this talk, I will present these recent developments and their applications in fabricating microsystems.　❞

講者 SPEAKER
▸　黃柏瀚教授 Prof. Po-Han HUANG
▸　國立清華大學動力機械工程學系 Department of Power Mechanical Engineering, National Tsing Hua University

Short Bio
❝　Dr. Po-Han Huang received his Ph.D. in Electrical Engineering (Micro and Nanosystems) and M.Sc. in Engineering Physics (Nanotechnology) from KTH Royal Institute of Technology in Sweden in 2024 and 2019, respectively. He received his B.Sc. in Power Mechanical Engineering from National Tsing Hua University in 2017. His research focuses on micro and nanofabrication (femtosecond laser processing, 3D printing and integration, and micromachining) of glass materials and 2D materials with applications in microsystems (3D MEMS, micro-optics, optical sensing, and micro-supercapacitors).　❞

時間 TIME
▸　2024/11/19 (TUE) 13:20 ~ 15:10

地點 VENUE
▸　化工館212教室 Classroom 212, Chemical Engineering Building